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dc.contributor.authorGöktaş, Hasan
dc.contributor.authorGökhan, Fikri Serdar
dc.date.accessioned2021-02-19T21:16:17Z
dc.date.available2021-02-19T21:16:17Z
dc.date.issued2019
dc.identifier.issn2072-666X
dc.identifier.urihttps://doi.org/10.3390/mi10110733
dc.identifier.urihttps://hdl.handle.net/20.500.12868/363
dc.descriptionGOKHAN, Fikri Serdar/0000-0001-6645-1742; Goktas, Hasan/0000-0002-2195-9531en_US
dc.descriptionWOS: 000502255300019en_US
dc.descriptionPubMed: 31671784en_US
dc.description.abstractRoom-temperature highly sensitive microbolometers are becoming very attractive in infrared (IR) sensing with the increase in demand for the internet of things (IOT), night vision, and medical imaging. Different techniques, such as building extremely small-scale devices (nanotubes, etc.) or using 2D materials, showed promising results in terms of high sensitivity with the cost of challenges in fabrication and low-noise readout circuit. Here, we propose a new and simple technique on the application of joule heating on a clamped-clamped beam without adding any complexity. It provides much better uniformity in temperature distribution in comparison to conventional joule heating, and this results in higher thermal stresses on fixed ends. This consequently brings around 60.5x improvement in the overall temperature sensitivity according to both theory and COMSOL (multiphysics solver). The sensitivity increased with the increase in the stiffness constant, and it was calculated as 134 N/m for a device with a 60.5x improvement. A considerable amount of decrease in the operation temperature (36x below 383 K and 47x below 428 K) was achieved via a new technique. That's why the proposed solution can be used either to build highly reliable long-term devices or to increase the thermal sensitivity.en_US
dc.description.sponsorshipScientific Research Project Foundation of Turkey [18073]en_US
dc.description.sponsorshipThis research was funded by the Scientific Research Project Foundation of Turkey (grant number 18073).en_US
dc.language.isoengen_US
dc.publisherMdpien_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectmicrobolometeren_US
dc.subjectinfrared sensoren_US
dc.subjectcomplementary metal-oxide semiconductor (CMOS)en_US
dc.subjecthigh sensitivityen_US
dc.subjecttemperature sensoren_US
dc.subjectmicroresonatoren_US
dc.subjectMEMSen_US
dc.subjectclamped-clamped beamen_US
dc.subjectthermal detectoren_US
dc.titleAnalysis and simulation of forcing the limits of thermal sensing for microbolometers in CMOS-MEMS technologyen_US
dc.typearticleen_US
dc.contributor.departmentALKÜen_US
dc.contributor.institutionauthor0-belirlenecek
dc.identifier.doi10.3390/mi10110733
dc.identifier.volume10en_US
dc.identifier.issue11en_US
dc.relation.journalMicromachinesen_US
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US


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